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Pressure Regulating Valve for Industrial Gas

Electronic Controlled Pressure Regulating Valve

Regulator for Semiconductor Industry
  • Regulator for Semiconductor Industry
    XR56 Series

    This is a pressure regulator for general use, developed for a gas supply system of various semiconductors and a manufacturing apparatus of semiconductor industry

    Inlet pressure: 2MPa
    Outlet pressure: 0.01-0.3MPa

  • Regulator for Semiconductor Industry

    This compact sized regulator is designed for semiconductor production equipment.

    Inlet pressure: 1MPa
    Outlet pressure: 0.05-0.7MPa

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